| 摘要 |
In order to provide a dielectric film which can avoid both boron leakage and an increase of the leak current, a semiconductor apparatus which has the dielectric film, a production method of the dielectric film and a production method of the semiconductor apparatus, a dielectric film layered product is applied which includes: a semiconductor substrate (2); a first hafnium-containing silicon oxide nitride layer (3a) made from a microcrystalline structure; a second hafnium-containing silicon oxide nitride layer (3b) made from a non-crystalline structure; and a layered film which is made from the first and second hafnium-containing silicon oxide nitride layers that are layered on the semiconductor substrate, and which has a nitrogen ratio of 15-40 atomic percent.
|
