发明名称 Dual storage node memory devices and methods for fabricating the same
摘要 Dual storage node memory devices and methods for fabricating dual storage node memory devices have been provided. In accordance with an exemplary embodiment, a method includes the steps of etching a plurality of trenches in a semiconductor substrate and forming a layered structure within the trenches. The layered structure includes a tunnel dielectric layer and a charge storage layer. Bit lines are formed within the semiconductor substrate and a layer of conductive material is deposited overlying the layered structure.
申请公布号 US7785965(B2) 申请公布日期 2010.08.31
申请号 US20060530145 申请日期 2006.09.08
申请人 SPANSION LLC 发明人 KIM UNSOON;MIN KYUNGHOON;CHENG NING;KINOSHITA HIROYUKI;RINJI SUGINO;THURGATE TIMOTHY;HUI ANGELA;CHOI JIHWAN;CHANG CHI
分类号 H01L21/336 主分类号 H01L21/336
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