发明名称 SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME
摘要 PURPOSE: A semiconductor device and a method for manufacturing the same are provided to form contact-plugs for decoupling capacitors which is isolated in the opening region of an interlayer insulating layer by eliminating a conductive layer on the interlayer insulating film. CONSTITUTION: A plurality of decoupling capacitors(14B1, 14B2) is formed on a semiconductor substrate(11). Contact-plugs for the decoupling capacitors are arranged between the semiconductor substrate and the decoupling capacitors. The contact plugs for the decoupling capacitors include a plurality of first contact plugs and a plurality of second contact plugs. The contact plugs for the decoupling capacitors are insulated by interlayer insulting film(IL) from each other. Storage contact-plugs(CS1) connecting with storage landing-pads(C1) are formed in the interlayer insulating film.
申请公布号 KR20100095242(A) 申请公布日期 2010.08.30
申请号 KR20090014423 申请日期 2009.02.20
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 HAN, DONG HYUN
分类号 H01L27/108;H01L21/8242 主分类号 H01L27/108
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