| 摘要 |
<p>PURPOSE: A method for inspecting a multi gray scale photo mask is provided to evaluate a mask based on an effective transmittance by simulating a space for forming the multi gray scale photo mask under an exposed condition. CONSTITUTION: A resolution image of a transfer pattern is obtained by an imaging unit(S2). A space formed by applying an exposure condition to the transfer pattern is obtained by processing the resolution image. The effective transmittance distribution of the transfer pattern is obtained by the space. A multi gray scale is evaluated based on the effective transmittance distribution(S6).</p> |
