ELECTRIC PRECIPITATOR FOR PROCESSING SEMICONDUCTOR DUST AND SCRUBBER WITH THE SAME

摘要

PURPOSE: An electric precipitator and a scrubber including the same are provided to improve the precipitation efficiency by forming a precipitating unit into a cylindrical shape to enlarge the surface area of the precipitator. CONSTITUTION: A housing unit(410) includes an inlet, an outlet, and an internal space which connects the inlet and the outlet. A precipitating unit(440) is located in the internal space and includes a plurality of precipitating materials. A discharging unit(430) is located between the precipitating unit and the inlet. A diffusion unit(420) includes a plurality of diffusing paths which is uniformly distributed.