DETECTION APPARATUS FOR PARTICLE ON THE GLASS AND DETECTION METHOD USING THE SAME

摘要

PURPOSE: A foreign materials inspection apparatus of a glass surface and an inspecting method thereof are provided to more specifically detect foreign materials regardless of the planarity of the glass substrates. CONSTITUTION: A foreign materials inspection apparatus of a glass surface comprises a top laser light irradiation unit(51) and a top detection camera(11) and a detection signal processor(90). The laser light irradiation unit examines the laser light from the top one side of the glass substrates. The laser light irradiation unit emits the laser light to the top other side face of the glass substrates. The detection signal processor analyzes a video signal outputted from the top detection camera. The detection signal processor detects foreign materials on the glass substrates. The detection signal processor offers the foreign material display screen which visually indicates the information about the foreign material.