ABSORPTION SPECTROSCOPIC ANALYZER FOR SEMICONDUCTOR MANUFACTURING PROCESS

摘要

PURPOSE: An optical extinction analyzing device for a semiconductor manufacturing process is provided to prevent the attaching of particles to the inside of an analyzing device. CONSTITUTION: An optical extinction analyzing device for a semiconductor manufacturing process comprises a fluid path converting mechanism(50) and a spectrophotometer(51). A fluid path converting mechanism is connected to the exhaust channel of the process chamber of the semiconductor manufacturing process. The spectrophotometer is connected to the exhaust channel. The spectrophotometer comprises cell and optical system. The spectrophotometer measures the moisture concentration among the process gas. A particle counter measuring particle is included in the process chamber. The fluid path converting mechanism comprises a controller.