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发明名称
Growth of polycrystalline 3C-SiC thin films by in-situ doping
摘要
申请公布号
KR100978711(B1)
申请公布日期
2010.08.30
申请号
KR20080072907
申请日期
2008.07.25
申请人
发明人
分类号
H01L21/20
主分类号
H01L21/20
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代理人
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