CONDUCTIVE OXIDE SINTERED BODY, SPUTTERING TARGET FORMED FROM SAID SINTERED BODY, AND MANUFACTURING METHOD THEREOF

摘要

A SRRUO3 CONDUCTIVE OXIDE SINTERED BODY CHARACTERIZED IN THAT THE RELATIVE DENSITY IS 93% OR MORE. BY IMPROVING THE ADDITIVE AMOUNT AND SINTERING CONDITIONS OF BI2O3, THE PRESENT INVENTION SEEKS TO IMPROVE THE RELATIVE DENSITY OF A SRRUO3 CONDUCTIVE OXIDE SINTERED BODY, AND TO PROVIDE A CONDUCTIVE OXIDE SINTERED BODY CAPABLE OF SUPPRESSING THE GENERATION OF PARTICLES DURING SPUTTERING UPON FORMING A THIN FILM AND IMPROVING THE QUALITY AND PRODUCTION YIELD; A SPUTTERING TARGET FORMED FROM SUCH SINTERED BODY; AND THE MANUFACTURING METHOD THEREOF.