| 摘要 |
Provided is a scanning optical measurement apparatus having super resolution. The scanning optical measurement apparatus includes: a light source; a first lens, which focuses light irradiated from the light source; a first pin hole, which is disposed next to the first lens; a second lens, which diverges light that passed through the first pin hole; a scanning unit, which scans light that passed through the second lens; a first beam splitter, which is disposed between the second lens and the scanning unit; an object lens, which focuses light that passed through the scanning unit on the subject; a slide, where the subject is placed; an optical probe, which reflects the light that passed through the subject after being irradiated from the light source; a second beam splitter, which is disposed between the scanning unit and the object lens; a first optical detector, which detects the light that passed through the first beam splitter after being reflected from the subject and the optical probe; a second pin hole, which is disposed between the first beam splitter and the first optical detector; and a second optical detector, which detects light that passed through the second beam splitter after being reflected from the subject and the optical probe. |
