发明名称 PRECURSOR COMPOSITION AND METHOD OF MANUFACTURING PIEZOELECTRIC ELEMENT
摘要 <P>PROBLEM TO BE SOLVED: To provide a composite oxide laminated body excelling in an insulation property, and a method of manufacturing the same. <P>SOLUTION: This composite oxide laminated body includes: a substrate 20; a first composite oxide layer 24 formed on the substrate 20 and represented by general formula ABO<SB>3</SB>; and a second composite oxide layer 26 formed on the first composite oxide layer 24 and represented by general formula AB<SB>1-x</SB>C<SB>x</SB>O<SB>3</SB>, wherein the element A comprises at least Pb, the element B comprises at least one of Zr, Ti, V, W and Hf, and the element C comprises at least one of Nb and Ta. <P>COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010187003(A) 申请公布日期 2010.08.26
申请号 JP20100050184 申请日期 2010.03.08
申请人 SEIKO EPSON CORP 发明人 KIJIMA TAKESHI;OHASHI KOJI;HAMADA YASUAKI
分类号 H01L21/316;B41J2/045;B41J2/055;B41J2/135;B41J2/14;C01G25/00;C01G33/00;H01L21/8246;H01L27/10;H01L27/105;H01L41/09;H01L41/18;H01L41/22;H01L41/27;H01L41/319;H01L41/39;H03H3/08;H03H9/145;H03H9/25 主分类号 H01L21/316
代理机构 代理人
主权项
地址