| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vibrating piece which can be easily manufactured and has excellent vibration efficiency. <P>SOLUTION: The vibrating piece has three or more odd number of vibrating arms. Each vibrating arm is vibrated in a Z direction which is a thickness direction. Adjacent vibrating arms are vibrated in opposite directions to each other. In the vibrating piece, the vibrating arms 11, 12, 13 include: lower electrodes 21, 22, 23 which are formed continuously from one of facing surfaces for regulating the thickness of each of the vibrating arms 11, 12, 13 at least to both side faces; piezoelectric films 31, 32, 33 formed on each of the lower electrodes 21, 22, 23 on one-faces of the vibrating arms 11, 12, 13; and upper electrodes 51, 52, 53 formed on each of the piezoelectric films 31, 32, 33. <P>COPYRIGHT: (C)2010,JPO&INPIT |
