发明名称 SPIN TRANSISTOR
摘要 <P>PROBLEM TO BE SOLVED: To provide a spin transistor using a Heusler alloy layer high in spin polarizability. Ž<P>SOLUTION: This spin transistor includes: a gate electrode 13 formed on a semiconductor substrate 11; and a source electrode and a drain electrode formed in grooves formed on the semiconductor substrate 11 on both sides of the gate electrode 13. At least either of the source electrode and the drain electrode includes: an MgO layer 14 formed on the bottom face in the groove formed on the substrate 11 and on a side face in the groove on the gate electrode 13 side; and a Heusler alloy layer 15 formed on the MgO layer 14 in the groove. The thickness of the MgO layer 14A formed on the side face is smaller than that of the MgO layer 14 formed on the bottom face. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2010186875(A) 申请公布日期 2010.08.26
申请号 JP20090030130 申请日期 2009.02.12
申请人 TOSHIBA CORP 发明人 ISHIKAWA MIZUE;MARUGAME TAKAO;IGUCHI TOMOAKI;SUGIYAMA HIDEYUKI;SAITO YOSHIAKI
分类号 H01L29/82;H01F10/32 主分类号 H01L29/82
代理机构 代理人
主权项
地址