| 摘要 |
<P>PROBLEM TO BE SOLVED: To properly extract a plurality of the specific structure elements of a measuring target having a layered structure while detecting a region at every specific structure element. Ž<P>SOLUTION: The structure data processing part 22 of this optical structure observing device is equipped with an optical stereoscopic structure image forming part 220, a shape memory part 221, a threshold value memory part 222, a cross-sectional image extracting part 223, a specific element extracting part 224, a specific element distribution calculating part 225, a distribution boundary line extracting part 226, a depleted region extracting part 227, a depleted region specifying element extracting part 228, a depleted region specifying element distribution calculating part 229, a depleted region distribution boundary line extracting part 230, a synthetic image forming part 231, a display control part 236, and an I/F part 237. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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