发明名称 |
Modulated microwave microscopy and probes used therewith |
摘要 |
A microwave microscope including a probe tip electrode vertically positionable over a sample and projecting downwardly from the end of a cantilever. A transmission line connecting the tip electrode to the electronic control system extends along the cantilever and is separated from a ground plane at the bottom of the cantilever by a dielectric layer. The probe tip may be vertically tapped near or at the sample surface at a low frequency and the microwave signal reflected from the tip/sample interaction is demodulated at the low frequency. Alternatively, a low-frequency electrical signal is also a non-linear electrical element associated with the probe tip to non-linearly interact with the applied microwave signal and the reflected non-linear microwave signal is detected at the low frequency. The non-linear element may be semiconductor junction formed near the apex of the probe tip or be an FET formed at the base of a semiconducting tip.
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申请公布号 |
US2010218286(A1) |
申请公布日期 |
2010.08.26 |
申请号 |
US20100706190 |
申请日期 |
2010.02.16 |
申请人 |
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY |
发明人 |
LAI KEJI;KELLY MICHAEL;SHEN ZHI-XUN |
分类号 |
G01Q20/02;G01Q60/00 |
主分类号 |
G01Q20/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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