发明名称 MOS TRANSISTOR WITH A P-FIELD IMPLANT OVERLYING EACH END OF A GATE THEREOF
摘要 The present invention provides a method for fabricating a MOS transistor (100) with suppression of edge transistor effect. In one embodiment of an NMOS, an elongate implant limb (110, HOa, 114) extends from each of two sidewalls (14a, 14b) of a p-type well (14) to partially wrap around each respective longitudinal end of the gate (20) and to overlay a portion thereof. In another embodiment, the elongate implant limb (110, 110a) extends into the drain/source drift region (32, 42). The NMOS transistor (100) thus fabricated allows the NMOS transistor to operate at relatively high voltages with reduced drain leakage current but with no additional masks or process time in the process integration.
申请公布号 US2010213545(A1) 申请公布日期 2010.08.26
申请号 US20080601821 申请日期 2008.05.15
申请人 X-FAB SEMICONDUCTOR FOUNDRIES AG 发明人 KHO CHING TEE ELIZABETH;TIONG MEE GUOH MICHAEL;KEE KIA YAW;LI WEN JUN;LI WENYI;MAY MICHAEL;LIEW CHEAN CHIAN ALAIN
分类号 H01L29/78;H01L21/336 主分类号 H01L29/78
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