发明名称 SEMICONDUCTOR PROCESSING APPARATUS
摘要 An output-history storing unit stores past and present measurement data input to a measurement-data input unit while distinguishing the measurement data for each of output sources. An output-fluctuation monitoring unit monitors, based on the measurement data stored in the output-history storing unit, output fluctuation in each of the output sources. An output control unit separately controls, based on the output fluctuation monitored by the output-fluctuation monitoring unit, outputs from the output sources.
申请公布号 US2010213186(A1) 申请公布日期 2010.08.26
申请号 US20100713978 申请日期 2010.02.26
申请人 KAMIMURA MASAKI 发明人 KAMIMURA MASAKI
分类号 H01L21/477 主分类号 H01L21/477
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