THE HEATER SHAPE MODIFICATION FOR LIFE TIME EXTENSION

摘要

PURPOSE: The heating element connection part structure exchanging within the grower for single crystalline silicon additionally constitutes the transformation prevention support stand. The deformation of the generation of heat part of the heating element is prevented. CONSTITUTION: The connection part(101) interlinks the heating element(100) and support stand(102). The support stand interlinks the copper electrode and heating element. The copper electrode transfers the electricity to insulator. The transformation prevention support stand(103) prevents the deformation of the heating element. The quartz crucible(104) accepts the silicon melt.