| 摘要 |
PURPOSE: The substrate bonding equipment and shock-absorbing film supply device keep the tension of the shock-absorbing film with the torque motor. Shock-absorbing between pressor and the stage are proceed efficiently. CONSTITUTION: The substrates is arranged in the stage. Pressor adds pressure to substrate through the shock-absorbing film(210). The supply reel(230) supplies the shock-absorbing film between the stage and pressor. The return reel(250) collects the shock-absorbing film. The supporting part(220) supports the supply reel and return reel in order to be possible to rotate. Controller controls the rotation angle of the supply reel.
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