| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a mechanical quantity sensor reducing other-axis sensitivity by reducing a shape failure of a flexible part displaceably supporting a weight part in multi-axis directions with symmetry in a capacitive mechanical quantity sensor that is a seal type device and satisfactorily maintaining a vacuum seal state in a sealed space in which the weight part is disposed, and to provide a method of manufacturing the same. <P>SOLUTION: The mechanical quantity sensor includes: a semiconductor substrate including a frame part, the weight part disposed inside the frame part, and the flexible part connecting the weight part with the frame part; a first substrate joined to one side of the frame part; the second substrate joined to the other side of the frame part; a first electrode provided on the first substrate and disposed opposite the weight part; and a second electrode provided on the second substrate and disposed opposite the weight part. The flexible part is coated with a protective film, and the weight part is disposed in the sealed space formed in the semiconductor substrate by the joining of the frame part with the first substrate and the second substrate. <P>COPYRIGHT: (C)2010,JPO&INPIT |
