| 摘要 |
PROBLEM TO BE SOLVED: To provide an interferometer that has an inexpensive configuration and can easily inspect objects to be inspected. SOLUTION: The interferometer includes: an interferometer body having a CCD 31 for capturing interference fringes formed by a surface shape of a work W; a display section 70 for displaying images of interference fringes captured by the CCD 31; and a personal computer 60 for displaying a chart including a reference line that serves as an evaluation basis of interference fringes displayed at the display section 70. COPYRIGHT: (C)2010,JPO&INPIT |
