发明名称 |
LAMINAR FLOW IN A PRECURSOR SOURCE CANISTER |
摘要 |
A canister apparatus for supplying a precursor material is disclosed. The canister apparatus includes a container defining an interior volume adapted to confine a precursor material, a tubular member adapted to introduce a carrier gas into the container, wherein the tubular member includes a distal end, and perforated portion spaced apart from the distal end that includes a plurality of radial holes, and an outlet adapted to flow out the precursor material and the carrier gas. |
申请公布号 |
WO2010053878(A3) |
申请公布日期 |
2010.08.26 |
申请号 |
WO2009US62999 |
申请日期 |
2009.11.02 |
申请人 |
APPLIED MATERIALS, INC.;CHOI, KENRIC T. |
发明人 |
CHOI, KENRIC T. |
分类号 |
C23C16/448;C23C16/44;H01L21/205 |
主分类号 |
C23C16/448 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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