发明名称 SUBSTRATE ALIGNMENT METHOD, SUBSTRATE ALIGNMENT DEVICE, LASER BEAM MACHINING APPARATUS AND SOLAR PANEL MANUFACTURING METHOD
摘要 <p><P>PROBLEM TO BE SOLVED: To perform alignment accurately without providing alignment marks on a substrate. <P>SOLUTION: At the point of time when the first machining process by a laser beam is finished, the image of places including both a shape changed portion formed by the machining process and the edge part of the substrate are obtained, and the image is utilized for the alignment process before the machining process in the next time or later. Because the image includes both images of the shape changed portion and the edge part of the substrate, picture recognizing process is facilitated. <P>COPYRIGHT: (C)2010,JPO&INPIT</p>
申请公布号 JP2010184290(A) 申请公布日期 2010.08.26
申请号 JP20090031903 申请日期 2009.02.13
申请人 HITACHI HIGH-TECHNOLOGIES CORP 发明人 ARAKI MASAKI;KATAGIRI KENJI;IZAKI MAKOTO
分类号 B23K26/02;B23K26/00;H01L31/04 主分类号 B23K26/02
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