| 摘要 |
PROBLEM TO BE SOLVED: To provide a disk surface inspection device capable of adjusting automatically an optical system so as to have sufficient sensitivity for detecting a defect which is an inspection object. SOLUTION: This device has a function capable of adjusting automatically arrangement of an optical system by sorting to form a database, each relation between each defect shape and arrangement of the optical system capable of detecting the shape with high sensitivity. As a method for forming the database, a method using an optical simulation, or an experimental method using a sample having an optional shape is applied. A pinhole position or a beam size is adjusted automatically so as to acquire the optimum arrangement of the optical system based on the database with respect to an input defect shape. COPYRIGHT: (C)2010,JPO&INPIT |
