发明名称 |
MEMS-BASED FTIR SPECTROMETER |
摘要 |
A MEMS-based Fourier Transform (FT) spectrometer is provided. According to an embodiment, the MEMS-based FT spectrometer is an FT infrared (FTIR) spectrometer. The FT spectrometer can include a beam splitter positioned to receive an incoming beam from a light source and split the incoming beam into a first sub-beam and a second sub-beam, a fixed mirror positioned to receive the first sub-beam from the beam splitter, a scanning MEMS mirror positioned to receive the second sub-beam from the beam splitter, and a photodetector, wherein a reflected first sub-beam from the fixed mirror and a reflected second sub-beam from the scanning MEMS mirror recombine at the beam splitter and become directed to the photodetector. According to one embodiment, the photodetector is a MEMS-based IR detector. In addition, the MEMS-based IR detector can be an un-cooled IR detector having a capacitive sensing structure. |
申请公布号 |
WO2010096081(A1) |
申请公布日期 |
2010.08.26 |
申请号 |
WO2009US52705 |
申请日期 |
2009.08.04 |
申请人 |
UNIVERSITY OF FLORIDA RESEARCH FOUNDATION, INC.;XIE, HUIKAI;WU, LEI;PAIS, ANDREA;SAMUELSON, SEAN, ROBERT |
发明人 |
XIE, HUIKAI;WU, LEI;PAIS, ANDREA;SAMUELSON, SEAN, ROBERT |
分类号 |
G01J3/45;B81B3/00;B81B7/02;G01N21/35 |
主分类号 |
G01J3/45 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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