A METHOD AND ARRANGEMENT FOR REALIZING A VACUUM IN A VACUUM CHAMBER

摘要

The invention relates to a method of realizing a vacuum in a vacuum chamber (400). The vacuum chamber is connected to a pumping system (300) shared by a plurality of vacuum chambers. The method includes separately pumping down each vacuum chamber. The invention further relates to an arrangement of a plurality of vacuum chambers connected to a pumping system. In this arrangement, the pumping system is arranged for pumping down each vacuum chamber separately.