| 摘要 |
PROBLEM TO BE SOLVED: To provide an operation method of an ozone concentrating apparatus capable of suppressing the chain decomposition of ozone caused by the vaporization of liquid ozone, and eliminating the risk of the breakage of the apparatus even if ozone decomposition occurs in a vaporization section. SOLUTION: The operation method of the ozone concentrating apparatus including a cooling means to cool ozone gas generated in an ozonizer to a temperature not higher the boiling point of ozone to separate liquid ozone from non-condensed gas, the vaporization section where the liquid ozone separated by the cooling means is vaporized by heating to obtain concentrated ozone, and a pipe liquid-sealing a separation boundary surface between liquid ozone and non-condensed gas to the vaporization section includes a step for adjusting the amount of ozone flowing to the pipe so that a regulated amount or larger of liquid ozone is not retained in the liquid-sealing part in the pipe. COPYRIGHT: (C)2010,JPO&INPIT
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