| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem, wherein tilting of wavefront exceeds the tilting allowance of a Shack Hartman sensor, when the wavefront aberrations of a wide-angle lens whose field of view is larger than the focal distance is measured by the Shack Hartman sensor, and hence measurements cannot be performed. SOLUTION: The Shack Hartman sensor is tilted at a pupil position of a lens, and is controlled so that the tilting of wavefront is within the allowance. By performing imaging in steps and repeats, while the same position is overlaid, composition is performed so that overlaid spots overlap, and thereby, the wavefront aberration of the lens of a large pupil diameter is measured. COPYRIGHT: (C)2010,JPO&INPIT
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