METHOD FOR SPLITTING A BEAM WITH ELECTROMAGNETIC RADIATION HAVING WAVELENGTHS IN THE EXTREME ULTRAVIOLET (EUV) AND THE INFRARED (IR) WAVELENGTH RANGE, AND OPTICAL GRATING AND OPTICAL DEVICE THEREFORE

摘要

Method for splitting the primary radiation from a generated beam with primary electromagnetic radiation having a wavelength in the extreme ultraviolet wavelength range (EUV radiation) and parasitic radiation having a wavelength in the infrared wavelength range (IR radiation) in an optical device using a reflective optical grating of the blazed grating type, which in a cross-section has a sawtooth profile which extends over a main plane with a determined periodicity (the line distance) of the grating, wherein the long sides of the sawtooth profile enclose a determined acute angle (the blaze angle) with the main plane, and optical grating and optical device for performing this method.