| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve detection precision by performing computation so that noise is canceled out also for a force component in the direction of Z axis. <P>SOLUTION: A multi-axis force sensor includes first and second bridge circuit groups Bg1-Bg4, Bu1-Bu4 for detecting values of resistance of first and second groups of resistive elements Sg1-Sg4, Su1-Su4 for detecting strain arranged at strain generation sections 41a-d. In the multi-axis force sensor, the strain generation portions 41a-d are formed on two axes that are orthogonal each other. The first group of resistive elements Sg1-Sg4 for detecting strain are arranged opposingly while sandwiching an action section 2 on one axis, and the second group of resistive elements Su1-Su4 for detecting strain are arranged opposingly while sandwiching the action section 2 on another axis. The first bridge circuit groups Bg1-Bg4 output a positive voltage when receiving tensile force, and the second bridge circuit groups Bu1-Bu4 output a negative voltage when receiving tensile force. <P>COPYRIGHT: (C)2010,JPO&INPIT |
