| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a deflector including a septum electrode for reducing discharge with a high-voltage electrode caused by collision of charged particles without degrading a heat removing property. Ž<P>SOLUTION: The deflector 1 includes the septum electrode 11 and the high-voltage electrode 12 for applying a high voltage. The septum electrode 11 in the deflector for extracting the charged particles has a base part 11a, and a coating part 11b for covering a surface of the base part 11a on a high-voltage electrode 12 side. The coating part 11b is formed of material of a higher melting point than the base part 11a. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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