| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an electron beam device equipped with an electron-emitting element having a simple configuration and high electron emission efficiency, operating stably, and with emitted electron beams effectively converged. <P>SOLUTION: On a substrate 1, an insulation member 3 and a gate 5 are formed, a concave part 7 is formed on the insulation member 3, a cathode 6 is arranged on a side surface of the insulation member 3. A gate 5 is formed in a concavo-convex shape having a retreat part9 protruding a region corresponding to the cathode 6 and retreating gate end parts on both sides of the region, the surface of the insulation member 3 exposed to the retreat part 9 is made retreat at least to a surface of an insulation layer 3a to form a control electrode 13 on the surface. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
