发明名称 Solid-state image pickup apparatus and production method thereof
摘要 A solid-state image pickup apparatus includes: a substrate in which a charge generation portion that generates a signal charge is formed on a surface layer; a layer covering an upper surface of the substrate; a waveguide formed on the layer covering the upper surface of the substrate at a position corresponding to the charge generation portion; a hollow portion formed on the layer covering the upper surface of the substrate at a position on an outer side of the waveguide; and an optically-transparent layer formed on the layer covering the upper surface of the substrate such that at least the hollow portion becomes airtight.
申请公布号 US2010213559(A1) 申请公布日期 2010.08.26
申请号 US20100658713 申请日期 2010.02.12
申请人 SONY CORPORATION 发明人 MIZUNO IKUE
分类号 H01L31/0232;H01L31/18 主分类号 H01L31/0232
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