APPARATUS FOR TESTING SEMICONDUCTOR DEVICE

摘要

PURPOSE: The apparatus for testing a semiconductor device minimizes the thermal transformation of the probe card according to the temperature condition of the semiconductor device test process. The contacting state between the probe [probe] of the probe card and the semiconductor device is maintain made regularly. CONSTITUTION: A substrate is placed in the substrate support unit. The tester head(430) is offered on the top of the substrate support unit. The tester head comprises the base(420) to which the probe card(300) is connected. The temperature control unit(500) is installed inside the base of the tester head. The temperature control unit controls the temperature of the probe card through the heat transmission with the probe card.