| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of processing a crystal substrate and a method of manufacturing a tuning fork type crystal vibration piece, capable of easily performing the work of a wide range area to a crystal X plate. <P>SOLUTION: The method of manufacturing the tuning fork type crystal vibration piece includes: a process S1 of sticking a first crystal X plate and a second crystal X plate together so that X axes of each other are in parallel and the positive/negative directions of the X axes are opposite to each other; a process S2 of radiating a laser from respective -X surface sides in the first crystal X plate and the second crystal X plate and forming altered layers in respective etching area; a process S5 of etching the etching area by performing etching with the altered layer as an origin; and a process S8 of forming an electrode on a vibration piece body. <P>COPYRIGHT: (C)2010,JPO&INPIT |
