发明名称 |
APPARATUS AND METHOD FOR ACTIVE VOLTAGE COMPENSATION |
摘要 |
A voltage compensation assembly adapted for apparatus having a prober for contacting th electronic elements on a substrate is described. The voltage compensation assembly includes a controller connected to the prober and adapted for active voltage compensation; and voltage measuring unit connected to the controller and for measuring a voltage on th substrate. |
申请公布号 |
WO2010046758(A3) |
申请公布日期 |
2010.08.26 |
申请号 |
WO2009IB07180 |
申请日期 |
2009.10.21 |
申请人 |
APPLIED MATERIALS, INC.;MUELLER, BERNHARD |
发明人 |
MUELLER, BERNHARD |
分类号 |
G01R31/02;G01R19/00;G01S1/00;H04M1/00 |
主分类号 |
G01R31/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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