| 摘要 |
<p>PURPOSE: A substrate processing system is provided to improve the through put of a substrate processing operation by effectively transferring substrates. CONSTITUTION: A plurality of transferring arms(160a, 160b, 160c, 160d) supports substrates. A supporting unit(170) supports the transferring arms to a vertical direction. An arm transferring unit(164) separately rotates each transferring arm around the supporting unit. A supporting unit transferring unit vertically and horizontally transfers the supporting unit along a plurality of substrate processing units.</p> |
