| 摘要 |
A high purity water delivery system has a reservoir (40) of purified water. A distribution line (42) extends downstream from an outlet (44) of the reservoir to a return (46) of the reservoir. A plurality of delivery stations each include an outlet (54′) and a diverter (102; 102′; 102″; 102′″). The diverter has an upstream inlet port (104) along the distribution line and a downstream outlet port (106) along the distribution line. The diverter has a supply port (108) downstream of the inlet port and a return port (110) downstream of the supply port. The diverter has a flow restriction (112; 112′; 216) between the supply port and the return port. Each delivery station includes a flow control valve (56′) between the outlet on the one hand and the supply port and return port on the other hand.
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