发明名称 |
METHOD FOR GENERATING LASER BEAM IRRADIATION TRAJECTORY |
摘要 |
The present invention relates to a method for generating a laser beam irradiation trajectory for processing a semiconductor package, capable of automatically, accurately and easily generating a laser beam irradiation trajectory in a mold portion of the semiconductor package during manufacture of the semiconductor package. According to the present invention, the method for generating a laser beam irradiation trajectory for a semiconductor package-processing apparatus, which irradiates a laser beam onto the mold portion of the semiconductor package along a spiral trajectory to form via holes, comprises the steps of: enabling a controller of a laser beam irradiation apparatus, in which a plurality of spiral trajectory patterns are stored by types, to select one of the spiral trajectory pattern types; inputting information on the selected spiral trajectory pattern to generate a spiral trajectory; and inputting a laser beam irradiation condition. |
申请公布号 |
WO2010095826(A2) |
申请公布日期 |
2010.08.26 |
申请号 |
WO2010KR00707 |
申请日期 |
2010.02.05 |
申请人 |
HANMISEMICONDUCTOR CO.,LTD;HUH, YIL;CHOI, HONG CHAN;KIM, YOUNG HWAN |
发明人 |
HUH, YIL;CHOI, HONG CHAN;KIM, YOUNG HWAN |
分类号 |
H01L21/00;H01L23/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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