发明名称 BRUSH ASSEMBLY AND APPARATUS FOR CLEANING A SUBSTRATE HAVING THE SAME
摘要 PURPOSE: A brush assembly and a substrate cleaning apparatus having the same are provided to improve cleaning effect by controlling a warpage of the brush assembly by constituting the length of a shaft. CONSTITUTION: A shaft(110) has a hollow structure. A brush(120) is formed the outside of the shaft. The brush is directly touched in the surface of the substrate and proceeds cleaning about the substrate. A supporting shaft(130) is respectively included in both ends of the shaft. The supporting shaft rotatably supports both ends of the shaft through bearing in the inside of the shaft. A fixing member(140) fixes the supporting shaft.
申请公布号 KR20100093783(A) 申请公布日期 2010.08.26
申请号 KR20090012870 申请日期 2009.02.17
申请人 SEMES CO., LTD. 发明人 SHIN, JAE YOON;JEON, EUN SU
分类号 H01L21/302;G02F1/13;H01L21/304 主分类号 H01L21/302
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