发明名称 |
BRUSH ASSEMBLY AND APPARATUS FOR CLEANING A SUBSTRATE HAVING THE SAME |
摘要 |
PURPOSE: A brush assembly and a substrate cleaning apparatus having the same are provided to improve cleaning effect by controlling a warpage of the brush assembly by constituting the length of a shaft. CONSTITUTION: A shaft(110) has a hollow structure. A brush(120) is formed the outside of the shaft. The brush is directly touched in the surface of the substrate and proceeds cleaning about the substrate. A supporting shaft(130) is respectively included in both ends of the shaft. The supporting shaft rotatably supports both ends of the shaft through bearing in the inside of the shaft. A fixing member(140) fixes the supporting shaft.
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申请公布号 |
KR20100093783(A) |
申请公布日期 |
2010.08.26 |
申请号 |
KR20090012870 |
申请日期 |
2009.02.17 |
申请人 |
SEMES CO., LTD. |
发明人 |
SHIN, JAE YOON;JEON, EUN SU |
分类号 |
H01L21/302;G02F1/13;H01L21/304 |
主分类号 |
H01L21/302 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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