| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin microphone unit of high-sensitivity and high-performance, the microphone unit effectively suppressing stress strain to diaphragms. SOLUTION: The microphone unit includes: a film substrate 11; conductive layers 15, 16 formed on both substrate surfaces of the film substrate 11; and an electroacoustic transduction section 12 including the diaphragm for transducing a sound pressure to an electronic signal. A coefficient of linear expansion of the film substrate 11 including the conductive layers 15, 16 ranges from a value not less than 0.8 to not more than 2.5 times larger than the coefficient of linear expansion of the diaphragm. COPYRIGHT: (C)2010,JPO&INPIT |
