发明名称 |
IMPROVED SUBSTRATE SUPPORT MATERIAL USEFUL FOR SCREEN PRINTING PROCESSES |
摘要 |
<p>The present invention provides a support material (137) used to support a substrate (150) during processing. The support material (137) comprises a non-woven material comprising a top region and a bottom region, wherein the top region (420) is less resilient than the bottom region (410). The non-woven material also has a first surface (141A) adjacent to the top region, and a first end and a second end. In some embodiments, the bottom region comprises a synthetic fabric and the top region comprises a polymeric material. Other embodiments of the invention include an apparatus and methods for processing substrates in a screen printing chamber that can deliver a repeatable and accurate screen printed pattern on one or more processed substrates using a non- woven support material. In one embodiment, the screen printing chamber is adapted to perform a screen printing process within a portion of a crystalline silicon solar cell production line in which a substrate is patterned with a desired material.</p> |
申请公布号 |
WO2010094347(A1) |
申请公布日期 |
2010.08.26 |
申请号 |
WO2009EP56331 |
申请日期 |
2009.05.25 |
申请人 |
APPLIED MATERIALS, INC.;BACCINI, ANDREA;GALIAZZO, MARCO |
发明人 |
BACCINI, ANDREA;GALIAZZO, MARCO |
分类号 |
H05K3/12;B41F15/20;H05K3/00 |
主分类号 |
H05K3/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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