Mothod for manufacturing a cathode arc for the plasma chamber and a cathode arc for the plasma chamber,申请号KR20080033275-传众专利搜索

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发明名称	Mothod for manufacturing a cathode arc for the plasma chamber and a cathode arc for the plasma chamber
摘要
申请公布号	KR100978115(B1)	申请公布日期	2010.08.26
申请号	KR20080033275	申请日期	2008.04.10
申请人		发明人
分类号	H05H1/34	主分类号	H05H1/34
代理机构		代理人
主权项
地址

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