Method for measuring an anisotropic surface diffusion tensor or surface energy anisotropies

摘要

The method involves measuring a surface topology of a surface to determine Fourier transform of the topology at an instant, and evolving the surface by surface diffusion. Another surface topology is measured after evolution of the surface to determine Fourier transform of the latter topology at another instant. Components of anisotropic surface diffusion tensor or surface energy anisotropies and combination of the tensor and/or anisotropies are determined for enabling measurement of deviation between the topologies to be minimized.