| 发明名称 |
Vapor Deposition of Benzotriazole (BTA) for protecting Copper Interconnects |
| 摘要 |
A method of protecting an interconnect is provided. The method includes forming an integrated circuit structure 12 having an interconnect, and depositing vaporized benzotriazole 32 on the interconnect. |
| 申请公布号 |
EP1465245(A3) |
申请公布日期 |
2010.08.25 |
| 申请号 |
EP20040101319 |
申请日期 |
2004.03.31 |
| 申请人 |
TEXAS INSTRUMENTS INC. |
发明人 |
XIA, CHANGFENG;SIVASOTHY, ARUNTHATHI;JACKSON, RICKY A.;HAIDER, ASAD M. |
| 分类号 |
H01L21/768;H01L21/312;H01L23/522 |
主分类号 |
H01L21/768 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
