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发明名称
PARTICLE DETECTOR SUITABLE FOR DETECTING IONS AND ELECTRONS
摘要
申请公布号
EP1636819(B1)
申请公布日期
2010.08.25
申请号
EP20040756170
申请日期
2004.06.25
申请人
FEI COMPANY
发明人
GERLACH, ROBERT L.;UTLAUT, MARK W.;DINGLE, TREVOR;UNCOVSKY, MAREK
分类号
H01J37/244;H01J;H01J37/30;H01J43/06;H01J49/02
主分类号
H01J37/244
代理机构
代理人
主权项
地址
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