METHOD FOR ASSAY ANALYZING TITANIUM CHLORIDE

摘要

PURPOSE: An analysis method of titanium chloride for a chemical vapor deposition is provided to obtain accurate and reproducible data, to reduce the analysis time, and to improve the reliability of the analysis. CONSTITUTION: An analysis method of titanium chloride comprises the following steps: sampling a sample containing the titanium chloride from a sealed space in which the moisture content is controlled less than 10 ppm; and analyzing the sample using a gas chromatography installed inside the space. The sealed space is a glove box. The sampling process is performed by an SUS bottle filled with helium gas.