LIQUID CRYSTAL EXPOSURE APPARATUS

摘要

PURPOSE: A liquid crystal exposure apparatus is provided to obtain a structure facilitating the position arrangement when assembling a stage, and to easily process and transport the apparatus. CONSTITUTION: A liquid crystal exposure apparatus(1) comprises the following: a work table(210,211,212) mounting the work; an operation stage including a transport device of the work table; a fixing stage(201) including a transport device of the operation stage; and a gantry unit supporting an exposing device exposing a mask pattern for the work on the work table. The fixing stage includes a structure capable of being divided into plural pieces. The fixing stage additionally includes a rail supporting the movement of the operation stage.