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发明名称
摘要
申请公布号
JP4529734(B2)
申请公布日期
2010.08.25
申请号
JP20050060114
申请日期
2005.03.04
申请人
发明人
分类号
H01L21/3065;C23C16/44;C23C16/455;H01L21/31
主分类号
H01L21/3065
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代理人
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