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发明名称	PLASMA PROCESSING APPARATUS
摘要
申请公布号	KR100978166(B1)	申请公布日期	2010.08.25
申请号	KR20087018681	申请日期	2007.03.13
申请人		发明人
分类号	H01L21/3065;H01L21/205;H01L21/683	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

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